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Klick is a professional kanban project management software. It combines Kanban with TFS/TFVC and with. Klick and MS Office Online, a whole new level of collaboration – all projects and.1. Field of the Invention
The present invention relates to a laser beam exposure device, a laser manufacturing method, and a semiconductor device, and, more particularly, to a laser beam exposure device, a laser manufacturing method, and a semiconductor device using a laser beam having a repetition frequency of 1 GHz or higher and achieving a high-density exposure.
2. Description of the Related Art
Laser devices as well as laser annealing devices and apparatuses are used in various manufacturing processes of semiconductor devices. The laser devices used in the laser annealing devices are, for example, gas laser devices that use natural gas, ethylene oxide, nitrogen oxide, or the like as a lasing gas, and excimer laser devices.
An excimer laser device is a high-frequency laser device that uses a chemical substance formed by reaction of two or more substances to implement lasing. The excimer laser device has a relatively high wavelength and can be turned on and off at a high frequency. However, the excimer laser device has a disadvantage that it becomes harder to control characteristics as the output power of the laser beam becomes higher.
On the other hand, a gas laser device is a low-frequency laser device that uses a gas having a high-frequency characteristic as a lasing material. Therefore, the gas laser device is able to continuously oscillate the laser beam at a predetermined wavelength and operate the laser device at a high-power output level. However, the gas laser device has a disadvantage that it is difficult to control a broad range of output wavelengths.
The present invention is made in order to solve the above-described disadvantages of the laser devices. An object of the present invention is to provide a laser beam exposure device, a laser manufacturing method, and a semic
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